Clean Robot NT420
Industry-leading compact, lightweight clean robot for high-speed, high-precision wafer-handling operations
With wide motion range eliminating the need for a traverse unit, this robot is one of the most compact, lightweight units in the industry and cuts energy consumption by about 40% over existing models. It also reduces shipping and packaging volume by 75% over existing models.
Featuring a highly rigid gear train developed in-house, this robot delivers high-speed, high-precision wafer handling, with ability to access two to four Front Opening Unified Pods)